Double-sided simultaneous stream scrubbing cleaning prevents contamination and particle accumulation on brushes.

Combination of stream dipping bath and ultrasonic cleaning prevents re-adhesion of particles.

This system is also applicable for chemical cleaning using acid and alkaline solvents.

DI water is circulated to expel buoyant particles floating on the water surface from the cleaning bath.

Cleaning fluid is removed quickly after rinsing and fresh cleaning fluid is added quickly to maintain and control purity.

The conventional Marangoni drying method has been improved to develop this new drying technology.

NEO drying is practical as a next generation drying system that replaces IPA vapor.

This technology is capable of drying with less thermal shock (from vapor drying) and physical shock (from spin drying).

Components are dipped in heated DI water and then drawn up slowly at a constant temperature to dry them.

The "DI water heating method" "expelling air bubbles from DI water" and "expelling vapor" are our original technologies.

Heated isopropyl alcohol vapor is delivered over cleaned components to dry their surfaces.

Water content is completely evaporated drying the components, in an environment where vapor is heated to a temperature over 100 ^°C by a re-heating (Super Heat) system.

A cleaning cage containing components is rotated to dry their surfaces.

Components are dried in an environment where the airflow is controlled. Thus, contamination due to splashing is eliminated.

The atmospheric pressure is reduced to enhance evaporation of solvents that moisten component surfaces.

Clean hot air, filtered with a HEPA or ULPA filter, suppresses particle contamination of the component surfaces.

Components with complicated shapes may be dried in a clean hot air tunnel with a conveyor.