||Began to make and sell cleaning systems as a cleaning equipment department of SpeedFam Co., Ltd.
||SpeedFam Clean System Co., Ltd. Established as an independent company for making and selling cleaning systems.
||Began to make and sell cleaning systems with scrubbers for
Began to export products to the USA, and countries in Europe and Asia.
||Integrated the cleaning equipment department of SpeedFam Co., Ltd. with SpeedFam Clean System Co., Ltd.
Established the first cleaning laboratory in the industry with clean rooms and ultrapure DI water equipment in the processing experiment room of SpeedFam Clean System Co., Ltd.
and started cleaning process development and cleaning quality evaluation.
||Began to make and sell optical disk cleaning systems.
||Began to make and sell single horizontal LCD glass cleaning systems.
||Succeeded in developing hot water drying systems for drying with alternatives to chlorofluorocarbons and started application experiments.
||Started mass production of cleaning systems with built-in hot DI water drying systems.
||Moved the Yamagata Plant from Tendo to Sagae City, Yamagata and established new factories.
||Established an R&D Center for developing cleaning processes onsite at the Yamagata Plant.
||Started mass production of modular type stream cleaning systems.
||Developed horizontal cleaning systems for PDP and TFT substrates and large-size components.
||Developed a combined double-sided simultaneous scrub and ultrasonic cleaning system (DSS-320).
||Integrated NEO drying.
||Developed coating system for large-size masks.
||Developed scrub cleaning systems for small-diameter (0.85") disks.
||Building more Yamagata Factory
||Removed to the new building in Ogami Ayase Kanagawa